Custom Load Locks
Customizable Load Locks
Custom Load Locks
Customizable Load Locks
Brochure
Overview
Hine’s Custom Star Systems are automated load locks designed to eliminate the need to vent and evacuate the OEMs process chamber prior to every process cycle. Our Custom Star Systems offer various levels of functionality and integration that meet technical and budgetary requirements of most OEM applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.
The SL-1200 Automated Load Lock loads and unloads a substrate cassette with up to 200mm diameter substrates into a process reactor through a standard Ø320mm vacuum gate valve. The high load system has an increased payload capacity (≈ 5 kg) over the standard system and provides a side hinged access door(s) for manually placing the cassette into/out of the transfer module.
The SL-1300 is an Automated Load Lock designed to load and unload a substrate cassette with up to 300mm diameter substrates into a process reactor through a pendulum vacuum gate valve. The high load system has an increased payload capacity (≈ 5 kg) over the standard system. It provides a side hinged access door(s) for manually placing the cassette into/out of the transfer module and comes standard with lid safety interlock switches.
The SL-200/300C acts as a combination Cassette Load Port AND Automated Load lock. It is designed to run in a vacuum environment to transfer wafers in batches from the SL 200C to the customer’s process chamber. The SL-200C operates exclusively in a clean room or similar environment and functions as an intelligent material handling sub-system.
SL-1200/1300 FEATURES
SL-1200/1300 OPTIONS
SL-200C/300C FEATURES
SL-200C/300C CUSTOMIZABLE OPTIONS
SL-1200/1300 Performance Specifications
SL-1200 | SL-1300 | |
Pressure | ≤ 1 x 10-3 Torr (with mechanical pump) ≤ 3 x 10-7 Torr (with high vacuum/turbo pump) | |
Leak Rate | ≤ 1 x 10-9 SCC He/Sec | |
400mm beyond slit valve | 590mm beyond slit valve | |
± 0.12 mm | ||
Placement accuracy | ≤ ± 0.25mm @ Full Extension | |
Payload* | 9.0 Kg [~20 lbs.] | |
Droop* | < 3.0mm (with 9.0 kg. at full extension) | |
Cassette Sensing | Polarized Retro-reflective Laser Sensors @ Retracted Position | |
Z-travel (stroke) | 25mm (measured at the bellows feedthrough) | |
Z-accuracy | ±0.1mm (measured at Actuator) | |
Particle performance† Particles < 0.5 μm | <0.1 particle adders/cm2/Pass <0.02 particle adders/cm2/Pass | |
PRODUCT SPECIFICATIONS
Feature | SL-1200 | SL-1300 |
Main Chamber (W x L x H) Drive Chamber (W x L x H) | 410 mm x 510 mm x 465 mm 200 mm x 650 mm x 190 mm | 452 mm x 557mm x 568 mm 194 mm x 726 mm x 180 mm |
Chamber Volume | ≈ 85 Liters | ≈ 121 Liters |
Chamber Load Door | Manual Hinge (Aluminum w/150 mm viewport) | |
Vacuum Ports | (X2) KF-25 Bulkhead Connections (X1) KF-40 Bulkhead Connections (X1) ISO-100 Bulkhead Connections | |
Process Module | ISO-320 mm Gate Valve | |
Transfer Height | Configurable at time of order placement | |
SL-200C/300C Specifications
(with HA-51V elevator)
Feature | SL-200C | SL-300C |
General | ||
Wafer Sizes Pay Load (Std/Hi Load)* Mounting facet Axes of Motion Input Power | ≤200mm† 1.5kg/5.0kg 200mm MESC R, Z 24 VDC 2.0 Amps | ≤300mm† 1.5kg/5.0kg 300mm MESC R, Z 24 VDC 2.0 Amps |
Maximum Temperature Exposed Materials Control Interface | 100˚C (higher available on request) 6061-T6 Aluminum, Stainless Steel 300 and 400 Series, Viton, Borosilicate Glass, Crytox, Delrin, PEEK 6061-T6 Aluminum, Stainless Steel 300 and 400 Series, Viton, Borosilicate Glass, Crytox, Delrin, PEEK | |
Vacuum performance | ||
Leak Rate Base operating pressure | 2x108 scc He/sec < 8x107 Torr (w/Turbo) | 2 x 108 scc He/sec < 8x107 Torr (w/Turbo) |
Repeatability - Measured as three standard deviations (3σ) | ||
R Z | ± 0.15mm ± 0.10mm | |
Max. Reach** | ||
75mm Wafer 100mm Wafer 125mm Wafer 150mm Wafer 200mm Wafer 300mm Wafer Vertical Stroke*** | 360mm 347mm 335mm 322mm 297mm N/A 0.5° | 477mm 465mm 453mm 440mm 415mm 365mm 0.5° |
† SEMI Standard sizes: Custom end effectors available upon request.
* Standard and High-Load designs available; End effector design varies with payload.
** Max Reach Measured from the edge of the slit valve.
*** Vertical stroke is optional.
