Atmospheric Robots

FEATURES

Simplified Integration
Compact Design including integrated controller
High reliability of > 10 million MCBF
Self-contained control system
RS-232/Ethernet control Interface
3-axis motion control
Standard and custom size arm segments
Payload up to 0.5 kg.
Standard and custom End Effectors for SEMI standard wafers & custom substrates
The best replacements for the Zbot and Orbitran robots

OPTIONS

End effector types: Vacuum chuck, Edge gripper
Wafer mapping sensor
Single / Dual end effector blades
Custom vertical strokes
Track mounting
Custom payloads

Atmospheric robots high-performance substrate handling solutions

Hine atmospheric robots are high-performance substrate handling solutions for semiconductor applications. These SCARA type robots provide reliable and clean transfer mechanism for atmospheric front ends. Hine atmospheric robots transfer a wide variety of substrates including SEMI standard wafers, reticles and masks.

Brochure

PRODUCT SPECIFICATIONS

Specifications - ROBOT	Hatm-4.0	Hatm-5.0
“Z” Travel	10mm	184mm (Standard size, others are available)
“Z” Repeatability	±0.1mm
Reach Repeatability	±0.1mm
Rotation	365 ˚ from “home” position
Rotation θ Repeatability	±0.01˚
Maximum Payload	0.5Kg: standard load units
Weight	5 Kgs	5 Kgs
Power	24VDC @ 3.0 Amps
Temperature Limit	100°C Max
MCBF	>1.5 x 107 Cycles
Control Interface	RS-232 and Ethernet
Safety Features	Over travel

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