Project Description

Vacuum Robotic Arms

Designed as the central handling robot for the Constellation Systems

Vacuum Robotic Arms

Designed as the central handling robot for the Constellation Systems

Vacuum-Robotic-Arms

FEATURES

  • High reliability of > 3 million MCBF

  • 2-axis or 3-axis motion control

  • Pay load up to 4.5kg

  • Standard and custom size arm segments

  • Standard and custom end effectors (single or dual)

  • Compact design including integrated controller

  • RS-232 / Ethernet control interface

  • CE/S2 compliant

  • HA-5.0V is the best replacement available for the Hine Design 4.5V

  • High vacuum compatible

  • Class 1 cleanroom compatible

Automation-Gears

Vacuum Robotic Arms Components

Designed as the central handling robot for the Constellation Systems, Hine Vacuum Robotic Arms can be integrated with any vacuum transfer systems. The HA-3.0 is the perfect fit for budget sensitive projects where no vertical travel is required. When substrate transfer with verified precision and repeatability within high vacuum environments is required, Hine HA-5.0 Vacuum Robotic Arm is the best solution.

Brochure

Vacuum robotic arms brochure

† Hine Automation offers end effector for SEMI standard sizes up to 300mm.
* Other sizes are available upon request.
* Payload depends on end effector. Higher payloads available upon request
‡ Measured as three standard deviations (3σ

PRODUCT SPECIFICATIONS

HA-3.2

Both

HA-5.0

Wafer Sizes

300mm†

Maximum Payload

4.5kg*

Mounting configuration

Top

Axes of Motion

R, θ

R, θ, Z

Weight

30kg*

35kg*

Vacuum performance
Base operating pressure
Leak Rate

1x10-7 Torr
1x10-9 scc He/sec

Input Power

24V DC at 10.0 Amps

Maximum Temperature

100⁰C

Exposed Materials

6061-T6 Aluminum, Stainless Steel 300
and 400 Series, Viton

Control Interface

RS-232 / Ethernet

MCBF

>1x106

SEMI S2

Compliant

CE

Repeatability‡
R
θ
Z

(3σ) 0.05mm
0.01⁰
0.05mm

Vertical Stroke

NA

35mm

Related Products

HA Logo - Designs and Manufactures Vacuum and Atmospheric Automation Systems and Robotic Components

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