Project Description
Vacuum Robotic Arms
Designed as the central handling robot for the Constellation Systems
Vacuum Robotic Arms
Designed as the central handling robot for the Constellation Systems

FEATURES
High reliability of > 3 million MCBF
2-axis or 3-axis motion control
Pay load up to 4.5kg
Standard and custom size arm segments
Standard and custom end effectors (single or dual)
Compact design including integrated controller
RS-232 / Ethernet control interface
CE/S2 compliant
HA-5.0V is the best replacement available for the Hine Design 4.5V
High vacuum compatible
Class 1 cleanroom compatible

Vacuum Robotic Arms Components
Designed as the central handling robot for the Constellation Systems, Hine Vacuum Robotic Arms can be integrated with any vacuum transfer systems. The HA-3.0 is the perfect fit for budget sensitive projects where no vertical travel is required. When substrate transfer with verified precision and repeatability within high vacuum environments is required, Hine HA-5.0 Vacuum Robotic Arm is the best solution.
† Hine Automation offers end effector for SEMI standard sizes up to 300mm.
* Other sizes are available upon request.
* Payload depends on end effector. Higher payloads available upon request
‡ Measured as three standard deviations (3σ
PRODUCT SPECIFICATIONS
HA-3.2 | Both | HA-5.0 | |
Wafer Sizes | 300mm† | ||
Maximum Payload | 4.5kg* | ||
Mounting configuration | Top | ||
Axes of Motion | R, θ | R, θ, Z | |
Weight | 30kg* | 35kg* | |
Vacuum performance | 1x10-7 Torr | ||
Input Power | 24V DC at 10.0 Amps | ||
Maximum Temperature | 100⁰C | ||
Exposed Materials | 6061-T6 Aluminum, Stainless Steel 300 | ||
Control Interface | RS-232 / Ethernet | ||
MCBF | >1x106 | ||
SEMI S2 | Compliant | ||
CE | |||
Repeatability‡ | (3σ) 0.05mm | ||
Vertical Stroke | NA | 35mm |