Project Description

Vacuum Robotic Arms

Designed as the central handling robot for the Constellation Systems

Vacuum Robotic Arms

Designed as the central handling robot for the Constellation Systems

Vacuum Robotic Arms

FEATURES

  • High reliability of > 3 million MCBF

  • 2-axis or 3-axis motion control

  • Pay load up to 4.5kg

  • Standard and custom size arm segments

  • Standard and custom end effectors (single or dual)

  • Compact design including integrated controller

  • RS-232 / Ethernet control interface

  • CE/S2 compliant

  • HA-5.0V is the best replacement available for the Hine Design 4.5V

  • High vacuum compatible

  • Class 1 cleanroom compatible

Automation-Gears

Vacuum Robotic Arms Components

Designed as the central handling robot for the Constellation Systems, Hine Vacuum Robotic Arms can be integrated with any vacuum transfer systems. The HA-3.0 is the perfect fit for budget sensitive projects where no vertical travel is required. When substrate transfer with verified precision and repeatability within high vacuum environments is required, Hine HA-5.0 Vacuum Robotic Arm is the best solution.

Brochure

Vacuum robotic arms brochure

† Hine Automation offers end effector for SEMI standard sizes up to 300mm.
* Other sizes are available upon request.
* Payload depends on end effector. Higher payloads available upon request
‡ Measured as three standard deviations (3σ

PRODUCT SPECIFICATIONS

HA-3.2

Both

HA-5.0

Wafer Sizes

300mm†

Maximum Payload

4.5kg*

Mounting configuration

Top

Axes of Motion

R, θ

R, θ, Z

Weight

30kg*

35kg*

Vacuum performance
Base operating pressure
Leak Rate

1x10-7 Torr
1x10-9 scc He/sec

Input Power

24V DC at 10.0 Amps

Maximum Temperature

100⁰C

Exposed Materials

6061-T6 Aluminum, Stainless Steel 300
and 400 Series, Viton

Control Interface

RS-232 / Ethernet

MCBF

>1x106

SEMI S2

Compliant

CE

Repeatability‡
R
θ
Z

(3σ) 0.05mm
0.01⁰
0.05mm

Vertical Stroke

NA

35mm

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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