Project Description
Vacuum Elevators
Vacuum Random Access Elevators
Vacuum Elevators
Vacuum Random Access Elevators

FEATURES
High reliability of > 3 million MCBF
Pay load up to 34kg
Compact design including integrated controller
RS-232 / Ethernet control interface
CE/S2 compliant
High vacuum compatible
Class 1 cleanroom compatible
Plug and Play upgrades for the Hine Design 48V and EMS 1248V elevator models

Vacuum Random Access Elevators with precise substrate indexing capabilities
With stainless steel bellows, brushless DC motor and proven design, Hine Vacuum Random Access Elevators provide precise substrate indexing capabilities within high vacuum environments. Robust undercarriages and precision guides allow our elevators to be integrated in applications requiring handling of heavy payloads.
† Head plates for SEMI standard wafer sizes up to 200mm available.
* Custom substrate sizes available upon request.
* Higher payloads available upon request
‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS
HA-50V | Both | HA-51V | |
Wafer Sizes | User Defined† | ||
Pay Load | 34kg* | ||
Mounting Configuration | Bottom | ||
Axes of Motion | Z | ||
Weight | 27kg | 33kg | |
Vacuum performance | <5.00E-09 Torr | ||
Input Power | 24 VDC at 2.5 Amps | ||
Maximum Temperature | 100⁰C | ||
Exposed Materials | Stainless Steel 300 | ||
Control Interface | RS-232 / Ethernet | ||
MCBF | >3.00E+06 | ||
SEMI S2 | Compliant | ||
CE | Compliant | ||
Repeatability | 0.05mm‡ | ||
Vertical Stroke | 185mm | 305mm |