Project Description

Vacuum Elevators

Vacuum Random Access Elevators

Vacuum Elevators

Vacuum Random Access Elevators

Vacuum-Elevators

FEATURES

  • High reliability of > 3 million MCBF

  • Pay load up to 34kg

  • Compact design including integrated controller

  • RS-232 / Ethernet control interface

  • CE/S2 compliant

  • High vacuum compatible

  • Class 1 cleanroom compatible

  • Plug and Play upgrades for the Hine Design 48V and EMS 1248V elevator models

Automation-Gears

Vacuum Random Access Elevators with precise substrate indexing capabilities

With stainless steel bellows, brushless DC motor and proven design, Hine Vacuum Random Access Elevators provide precise substrate indexing capabilities within high vacuum environments. Robust undercarriages and precision guides allow our elevators to be integrated in applications requiring handling of heavy payloads.

Brochure

Vacuum Elevators brochure

† Head plates for SEMI standard wafer sizes up to 200mm available.
* Custom substrate sizes available upon request.
* Higher payloads available upon request
‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

HA-50V

Both

HA-51V

Wafer Sizes

User Defined†

Pay Load

34kg*

Mounting Configuration
 

Bottom

Axes of Motion

Z

Weight

27kg

33kg

Vacuum performance
Base operating pressure
Leak Rate

<5.00E-09 Torr
1.00E-09 scc He/sec

Input Power

24 VDC at 2.5 Amps

Maximum Temperature

100⁰C

Exposed Materials

Stainless Steel 300
and 400 Series

Control Interface

RS-232 / Ethernet

MCBF

>3.00E+06

SEMI S2

Compliant

CE

Compliant

Repeatability
Z

0.05mm‡

Vertical Stroke

185mm

305mm

Related Products

HA Logo - Designs and Manufactures Vacuum and Atmospheric Automation Systems and Robotic Components

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