Project Description

Vacuum Aligners

High vacuum environment Aligners

Vacuum Aligners

High vacuum environment Aligners

Vacuum-Aligners

FEATURES

  • High reliability of > 3 million MCBF

  • Fiducial alignment and centering alignment – Delta Pick

  • High vacuum compatible

  • RS-232 / Ethernet control interface

  • CE/S2 compliant

  • Available for wafer sizes up to 300mm

  • Class 1 cleanroom compatible

  • Translucent or opaque wafers

Automation-Gears

High vacuum environment aligners

Our aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although our Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks.

Brochure

Vacuum Aligners

† SEMI standard sizes up to 300mm. Other sizes are available upon request.
‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

HA-71

Both

HA-75

Wafer Sizes

300mm†

Wafer Types

Opaque and Transparent

Mounting Facet

200mm or 300mm Facet
 

N/A

Aligner Enclosure Size

200mm or 300mm

Integrated Aligner

Axes of Motion

0

Vacuum Performance
Base operating pressure
Leak Rate

<5.00E-09 Torr
1.00E-09 scc He/sec

Input Power

24V DC at 2.0 Amps

Maximum Temperature

100⁰C

Exposed Materials

6061-T6 Aluminum,
Stainless Steel 300 and 400 Series,
Viton, Borosilicate Glass

Control Interface

RS-232 / Ethernet

MCBF

>3.00E+06

CE

Compliant

SEMI

Compliant

Repeatability
θ
Centering

0.02⁰‡
<0.10mm‡

Calibration Wafer Included
 

Yes

Related Products

HA Logo - Designs and Manufactures Vacuum and Atmospheric Automation Systems and Robotic Components

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