Project Description
Vacuum Aligners
High vacuum environment Aligners
Vacuum Aligners
High vacuum environment Aligners

FEATURES
High reliability of > 3 million MCBF
Fiducial alignment and centering alignment – Delta Pick
High vacuum compatible
RS-232 / Ethernet control interface
CE/S2 compliant
Available for wafer sizes up to 300mm
Class 1 cleanroom compatible
Translucent or opaque wafers

High vacuum environment aligners
Our aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although our Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks.
† SEMI standard sizes up to 300mm. Other sizes are available upon request.
‡ Measured as three standard deviations (3σ)
PRODUCT SPECIFICATIONS
HA-71 | Both | HA-75 | |
Wafer Sizes | 300mm† | ||
Wafer Types | Opaque and Transparent | ||
Mounting Facet | 200mm or 300mm Facet | N/A | |
Aligner Enclosure Size | 200mm or 300mm | Integrated Aligner | |
Axes of Motion | 0 | ||
Vacuum Performance | <5.00E-09 Torr | ||
Input Power | 24V DC at 2.0 Amps | ||
Maximum Temperature | 100⁰C | ||
Exposed Materials | 6061-T6 Aluminum, | ||
Control Interface | RS-232 / Ethernet | ||
MCBF | >3.00E+06 | ||
CE | Compliant | ||
SEMI | Compliant | ||
Repeatability | 0.02⁰‡ | ||
Calibration Wafer Included | Yes |