Vacuum Aligners

High vacuum environment Aligners

Vacuum Aligners

High vacuum environment Aligners

FEATURES

High reliability of > 3 million MCBF
Fiducial alignment and centering alignment – Delta Pick
High vacuum compatible
RS-232 / Ethernet control interface
CE/S2 compliant
Available for wafer sizes up to 300mm
Class 1 cleanroom compatible
Translucent or opaque wafers

High vacuum environment aligners

Our aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although our Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks.

Brochure

† SEMI standard sizes up to 300mm. Other sizes are available upon request.
‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

	HA-71	Both	HA-75
Wafer Sizes		300mm†
Wafer Types		Opaque and Transparent
Mounting Facet	200mm or 300mm Facet		N/A
Aligner Enclosure Size	200mm or 300mm		Integrated Aligner
Axes of Motion		0
Vacuum Performance Base operating pressure Leak Rate		<5.00E-09 Torr 1.00E-09 scc He/sec
Input Power		24V DC at 2.0 Amps
Maximum Temperature		100⁰C
Exposed Materials		6061-T6 Aluminum, Stainless Steel 300 and 400 Series, Viton, Borosilicate Glass
Control Interface		RS-232 / Ethernet
MCBF		>3.00E+06
CE		Compliant
SEMI		Compliant
Repeatability θ Centering		0.02⁰‡ <0.10mm‡
Calibration Wafer Included		Yes