Project Description
Cassette Load Ports
Vacuum and Atmospheric Cassette Load Ports
Cassette Load Ports
Vacuum and Atmospheric Cassette Load Ports
FEATURES
Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator
High reliability of > 3 million MCBF
Handles wafer sizes up to 200mm
Sophisticated automation features including wafer mapping, wafer cross- slot detection
Safety interlocks
High vacuum or Atmospheric compatibility
RS-232 / Ethernet control interface
Slit Valve or Valve door
OPTIONS
Single Wafer & 4, 25 or 50 wafer Cassettes
Cassette cradles

Vacuum and Atmospheric Cassette Load Ports
Designed to provide cassette loading and unloading capabilities for the Constellation family of cluster systems our Vacuum and Atmospheric Cassette to Cassette Load Ports (CLP & ALP) can be customized to adapt to a Customer’s specific requirements. The various Load Port configurations are built around the Hine Automation Vacuum & Atmospheric Elevators with material indexing and positional sensing capabilities.
The Vacuum Mini Load Port (MLP) was designed as a single and multi-wafer Load Port to provide loading and unloading capabilities for the Constellation family of cluster systems. The MLP configuration is cost-effective solution for application where a full Cassette is not required and includes a self-centering design for the cassette and wafer eliminating the need for a positional alignment device.
Full system integration requires only limited facilities connections and an Ethernet control interface. With a complete onboard control system our Load Ports function as an intelligent material handling sub system.
* Head Automation offers cassette cradle for SEMI standard sizes up to 200mm. Other sises are available upon request.
† Payload with standard configuration
** Measured as three standard deviations (3σ)
PRODUCT SPECIFICATIONS
ALP-200 | CLP-200 | MLP-200 | |
Wafer Sizes | ≤200mm* | ||
Pay Load | 34 Kg† | ||
Axis of motion | Z | Z | N/A |
Transfer Height | 1100mm | ||
High Vacuum Configuration | N/A | Available | |
Vacuum performance, | N/A | <5.00E-06 Torr | <5.00E-06 Torr |
Input Power | 24VDC @ 5 Amps | ||
Cassette type | SEMI Standard Cassettes (≤200mm) | ||
Materials Exposed | 6061-T6 Aluminum, Stainless Steel 300 | ||
Mounting | 200mm MESC Slit Valve | ||
Max. Operating Temperature | 100°C | ||
Repeatability | 0.10mm ** | 0.10mm ** | N/A |
Speed | 185mm | 185mm | N/A |
Cassette Mapping time | 10 seconds | 10 seconds | N/A |
MTBF | >3.00E+06 >3.00E+06 | >3.00E+06 | N/A |