Project Description

Vacuum and Atmospheric Cassette Load Ports

Vacuum and Atmospheric Cassette Load Ports

Vacuum and Atmospheric Cassette Load Ports

Vacuum and Atmospheric Cassette Load Ports

Cassette Load Ports

FEATURES

  • Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator

  • High reliability of > 3 million MCBF

  • Handles wafer sizes up to 200mm

  • Sophisticated automation features including wafer mapping, wafer cross- slot detection

  • Safety interlocks

  • High vacuum or Atmospheric compatibility

  • RS-232 / Ethernet control interface

  • Slit Valve or Valve door

OPTIONS

  • Single Wafer & 4, 25 or 50 wafer Cassettes

  • Cassette cradles

Automation-Gears

Vacuum and Atmospheric Cassette Load Ports

Designed to provide cassette loading and unloading capabilities for the Constellation family of cluster systems our Vacuum and Atmospheric Cassette to Cassette Load Ports (CLP & ALP) can be customized to adapt to a Customer’s specific requirements. The various Load Port configurations are built around the Hine Automation Vacuum & Atmospheric Elevators with material indexing and positional sensing capabilities.

The Vacuum Mini Load Port (MLP) was designed as a single and multi-wafer Load Port to provide loading and unloading capabilities for the Constellation family of cluster systems. The MLP configuration is cost-effective solution for application where a full Cassette is not required and includes a self-centering design for the cassette and wafer eliminating the need for a positional alignment device.

Full system integration requires only limited facilities connections and an Ethernet control interface. With a complete onboard control system our Load Ports function as an intelligent material handling sub system.

Brochure

Hine_Cassette_Load_Ports_Brochure

* Head Automation offers cassette cradle for SEMI standard sizes up to 200mm. Other sises are available upon request.
† Payload with standard configuration
** Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

ALP-200

CLP-200

MLP-200

Wafer Sizes

≤200mm*

Pay Load

34 Kg†

Axis of motion

Z

Z

N/A

Transfer Height

1100mm

High Vacuum Configuration

N/A

Available

Vacuum performance,
Base operating pressure,
Leak Rate

N/A
N/A

<5.00E-06 Torr
1.00E-09 scc He/sec

<5.00E-06 Torr
1.00E-09 scc He/sec

Input Power

24VDC @ 5 Amps

Cassette type

SEMI Standard Cassettes (≤200mm)
Custom 4 wafer cassette

Materials Exposed

6061-T6 Aluminum, Stainless Steel 300
and 400 Series, Viton, Borosilicate Glass

Mounting

200mm MESC Slit Valve
Support Frame as Required

Max. Operating Temperature

100°C

Repeatability
Vertical Travel

0.10mm **

0.10mm **

N/A

Speed
Vertical Travel

185mm

185mm

N/A

Cassette Mapping time

10 seconds

10 seconds

N/A

MTBF

>3.00E+06

>3.00E+06

>3.00E+06

N/A

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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