Vacuum and Atmospheric Cassette Load Ports

FEATURES

Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator
High reliability of > 3 million MCBF
Handles wafer sizes up to 200mm
Sophisticated automation features including wafer mapping, wafer cross- slot detection
Safety interlocks
High vacuum or Atmospheric compatibility
RS-232 / Ethernet control interface
Slit Valve or Valve door

OPTIONS

Single Wafer & 4, 25 or 50 wafer Cassettes
Cassette cradles

Vacuum and Atmospheric Cassette Load Ports

Designed to provide cassette loading and unloading capabilities for the Constellation family of cluster systems our Vacuum and Atmospheric Cassette to Cassette Load Ports (CLP & ALP) can be customized to adapt to a Customer’s specific requirements. The various Load Port configurations are built around the Hine Automation Vacuum & Atmospheric Elevators with material indexing and positional sensing capabilities.

The Vacuum Mini Load Port (MLP) was designed as a single and multi-wafer Load Port to provide loading and unloading capabilities for the Constellation family of cluster systems. The MLP configuration is cost-effective solution for application where a full Cassette is not required and includes a self-centering design for the cassette and wafer eliminating the need for a positional alignment device.

Full system integration requires only limited facilities connections and an Ethernet control interface. With a complete onboard control system our Load Ports function as an intelligent material handling sub system.

Brochure

* Head Automation offers cassette cradle for SEMI standard sizes up to 200mm. Other sises are available upon request.
† Payload with standard configuration
** Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

	ALP-200	CLP-200	MLP-200
Wafer Sizes		≤200mm*
Pay Load		34 Kg†
Axis of motion	Z	Z	N/A
Transfer Height		1100mm
High Vacuum Configuration	N/A	Available
Vacuum performance, Base operating pressure, Leak Rate	N/A N/A	<5.00E-06 Torr 1.00E-09 scc He/sec	<5.00E-06 Torr 1.00E-09 scc He/sec
Input Power		24VDC @ 5 Amps
Cassette type		SEMI Standard Cassettes (≤200mm) Custom 4 wafer cassette
Materials Exposed		6061-T6 Aluminum, Stainless Steel 300 and 400 Series, Viton, Borosilicate Glass
Mounting		200mm MESC Slit Valve Support Frame as Required
Max. Operating Temperature		100°C
Repeatability Vertical Travel	0.10mm **	0.10mm **	N/A
Speed Vertical Travel	185mm	185mm	N/A
Cassette Mapping time	10 seconds	10 seconds	N/A
MTBF	>3.00E+06 >3.00E+06	>3.00E+06	N/A