Project Description

Atmospheric Elevators

Atmospheric Random Access Elevator Components

Atmospheric Elevators

Atmospheric Random Access Elevator Components

Atmospheric-Elevators

FEATURES

  • High reliability of > 3 million MCBF

  • Pay load up to 34kg

  • Compact design including integrated controller

  • RS-232 / Ethernet control interface

  • CE/S2 compliant

  • Class 1 cleanroom compatible

  • Stroke 185mm and 305mm

Automation-Gears

Atmospheric Random Access Elevator Components

With brushless DC motor and proven design, Hine Atmospheric Random Access Elevators provide precise substrate indexing capabilities within ultra clean environments. Robust undercarriages and precision guides allow our elevators to be integrated in applications requiring handling of heavy payloads.

Brochure

Atmospheric robotic arms brochure

† Head plates for SEMI standard wafer sizes up to 200mm available.
Custom substrate sizes available upon request.
* Higher payloads available upon request
‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

HAtm-50

Wafer Sizes

User Defined†

Wafer Sizes

34kg*

Mounting Configuration

Bottom

Axes of Motion

Z

Weight

27kg

Input Power

24 VDC at 2.5 Amps

Maximum Temperature

100⁰C

Exposed Materials

Stainless Steel 300
and 400 Series

Control Interface

RS-232 / Ethernet

MCBF

>3.00E+06

SEMI S2

compliant

CE

compliant

Repeatability
Z

0.05mm‡

Vertical Stroke

185mm

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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