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Cassette Load Ports

2021-03-30T21:08:56+00:00

Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports Vacuum and Atmospheric Cassette Load Ports FEATURES Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator High reliability of > 3 million MCBF Handles wafer sizes up [...]

Atmospheric Vacuum Robotic Arms

2021-03-30T20:52:38+00:00

Atmospheric Vacuum Robotic Arms Atmospheric robots are high-performance substrate handling solutions for semiconductor applications Atmospheric Vacuum Robotic Arms Atmospheric robots are high-performance substrate handling solutions for semiconductor applications FEATURES High reliability of > 10 million MCBF 3-axis motion control Pay load up to 0.5kg [...]