Project Description

Vacuum Elevators

Vacuum Random Access Elevators

Vacuum Elevators

Vacuum Random Access Elevators

Vacuum-Elevators

FEATURES

  • High reliability of > 3 million MCBF

  • Pay load up to 34kg

  • Compact design including integrated controller

  • RS-232 / Ethernet control interface

  • CE/S2 compliant

  • High vacuum compatible

  • Class 1 cleanroom compatible

  • Plug and Play upgrades for the Hine Design 48V and EMS 1248V elevator models

Automation-Gears

Vacuum Random Access Elevators with precise substrate indexing capabilities

With stainless steel bellows, brushless DC motor and proven design, Hine Vacuum Random Access Elevators provide precise substrate indexing capabilities within high vacuum environments. Robust undercarriages and precision guides allow our elevators to be integrated in applications requiring handling of heavy payloads.

Brochure

Vacuum Elevators brochure

† Head plates for SEMI standard wafer sizes up to 200mm available.
* Custom substrate sizes available upon request.
* Higher payloads available upon request
‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

[wptb id=2361]

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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