Project Description

Vacuum Aligners

High vacuum environment Aligners

Vacuum Aligners

High vacuum environment Aligners

Vacuum-Aligners

FEATURES

  • High reliability of > 3 million MCBF

  • Fiducial alignment and centering alignment – Delta Pick

  • High vacuum compatible

  • RS-232 / Ethernet control interface

  • CE/S2 compliant

  • Available for wafer sizes up to 300mm

  • Class 1 cleanroom compatible

  • Translucent or opaque wafers

Automation-Gears

High vacuum environment aligners

Our aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although our Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks.

Brochure

Vacuum Aligners

† SEMI standard sizes up to 300mm. Other sizes are available upon request.
‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

[wptb id=2363]

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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