Project Description

Vacuum Load Lock Chambers

Single Substrate Vacuum Transfer Systems

Vacuum Load Lock Chambers

Single Substrate Vacuum Transfer Systems

FEATURES

  • Handles wafer sizes up to 450mm

  • High vacuum compatibility

  • End effector for SEMI Standard and custom substrates

  • CE compliant

OPTIONS

  • Vertical motion – Z lift
  • Vacuum and gas plumbing

  • Integrated transfer control module

  • Custom end effectors

Automation-Gears

Single Substrate Vacuum Transfer Systems

Hine’s Star Systems are automated load locks designed to eliminate the need to vent and evacuate the OEMs process chamber prior to every process cycle. Our Star Systems offers various levels of functionality and integration that meets technical and budgetary requirements of most OEM applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.

Brochure

Hine_Star_Systems_Brochure - Vacuum Load Lock Chambers

† SEMI standard sizes available and custom end effectors available upon request.
‡ Measured as three standard deviations (3σ)
* End effector design may impact max payload capability
** Maximum reach measured from the edge of the slit valve
*** Vertical stroke is optional

PRODUCT SPECIFICATIONS

SL-200

SL-300

SL-450

Wafer Sizes

≤200mm†

≤300mm†

≤450mm†

Pay Load (Std/Hi Load)

1.5/5.0 kg*

Mounting Facet

200mm MESC

300mm MESC

450mm MESC

Axes of Motion

R, Z

Vacuum performance
Base operating pressure
Leak Rate

<5.00E-07 Torr
1.00E-09 scc He/sec

Input Power

24 VDC 2.0 Amps

Maximum Temperature

100⁰C

Exposed Materials

6061-T6 Aluminum, Stainless Steel 300
and 400 Series, Viton,
Borosilicate Glass, Crytox, Delrin, PEEK

Control Interface

RS-232 / Ethernet

MCBF

>3.00E+05

CE

Compliant

Repeatability
R
Z

0.15mm‡
0.10mm‡

Max. Reach

305mm**

355mm**

635mm**

Vertical Stroke

0.5°***

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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