Project Description

Vacuum Transfer Systems Integrated

Cassette-to-Cassette Vacuum Transfer Systems

Vacuum Transfer Systems Integrated

Cassette-to-Cassette Vacuum Transfer Systems

Vacuum-Transfer-Integrated-Systems

FEATURES

  • Hine Robotics: HA-5.0 Robotic Arm & HA-50V Vacuum Elevator

  • High reliability of > 3 million MCBF

  • Handles wafer sizes up to 200mm

  • Sophisticated automation features including wafer mapping, wafer cross-slot detection

  • Safety interlocks

  • High vacuum compatibility

  • CE/S2 compliant

  • RS-232 / Ethernet control interface

OPTIONS

  • Optical aligner

  • SEMI standard and custom end effectors

  • Dual/Single end effector

  • 25 or 50 wafer cassettes

Automation-Gears

Cassette-to-Cassette Vacuum Transfer Systems

As Cassette-To-Cassette Vacuum Transfer Systems, the Constellation Systems integrate the reliability of Hine Vacuum Robotics and the latest system integration technology into a functional design with a small system footprint. The Constellation System can be customized to many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.

Brochure

Hine_Star_Systems_Brochure - Vacuum Transfer Systems

† SEMI standard sizes up to 200mm. Other sizes are available upon request.
* Custom wafer cassettes upon request.
◊ CLP Slit Valve and Isolation Plumbing come standard with each cassette load port.
‡ Optional CLP Slit Valve and Isolation Plumbing available.

PRODUCT SPECIFICATIONS

[wptb id=2323]

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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