Vacuum Cassette Load Ports Vacuum Cassette Load Ports Vacuum Cassette Load Ports Vacuum Cassette Load Ports CLP - Vacuum Cassette to Cassette Load Port for 25 & 50 wafer cassette MLP - Vacuum Mini Load Port for Single wafer up to a 4-wafer cassette [...]

Atmospheric Robots Atmospheric Robots Atmospheric Robots Atmospheric Robots FEATURES Simplified Integration Compact Design including integrated controller High reliability of > 10 million MCBF Self-contained control system RS-232/Ethernet control Interface 3-axis motion control Standard and custom size arm segments [...]

Atmospheric Cassette Load Ports Atmospheric Cassette Load Ports Atmospheric Cassette Load Ports Atmospheric Cassette Load Ports FEATURES High reliability of > 3 million MCBF Handles wafer sizes up to 200mm Sophisticated automation features including wafer mapping, wafer cross-slot detection Safety interlocks [...]

Atmospheric Elevators Atmospheric Random Access Elevator Components Atmospheric Elevators Atmospheric Random Access Elevator Components FEATURES High reliability of > 3 million MCBF Pay load up to 34kg Compact design including integrated controller RS-232 / Ethernet control interface CE/S2 compliant [...]

Atmospheric Vacuum Robotic Arms Atmospheric robots are high-performance substrate handling solutions for semiconductor applications Atmospheric Vacuum Robotic Arms Atmospheric robots are high-performance substrate handling solutions for semiconductor applications FEATURES High reliability of > 10 million MCBF 3-axis motion control Pay load up to 0.5kg [...]