Star Systems
Single Substrate Vacuum Transfer Systems

Hine's Star Systems are automated load locks designed to eliminate the need to vent and evacuate the OEMs process chamber prior to every process cycle. Our Star Systems offers various levels of functionality and integration that meets technical and budgetary requirements of most OEM applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.

FEATURES

  • Handles wafer sizes up to 450mm
  • High vacuum compatibility
  • End effector for SEMI Standard and custom substrates
  • CE compliant

OPTIONS

  • Vertical motion – Z lift
  • Vacuum and gas plumbing
  • Integrated transfer control module
  • Custom end effectors

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Star Systems Brochure


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