Project Description
Vacuum Transfer Integrated Systems
Cassette-to-Cassette Vacuum Transfer Systems
Vacuum Transfer Integrated Systems
Cassette-to-Cassette Vacuum Transfer Systems
FEATURES
Hine Robotics: HA-5.0 Robotic Arm & HA-50V Vacuum Elevator
High reliability of > 3 million MCBF
Handles wafer sizes up to 200mm
Sophisticated automation features including wafer mapping, wafer cross-slot detection
Safety interlocks
High vacuum compatibility
CE/S2 compliant
RS-232 / Ethernet control interface
OPTIONS
Optical aligner
SEMI standard and custom end effectors
Dual/Single end effector
25 or 50 wafer cassettes

Cassette-to-Cassette Vacuum Transfer Systems
As Cassette-To-Cassette Vacuum Transfer Systems, the Constellation Systems integrate the reliability of Hine Vacuum Robotics and the latest system integration technology into a functional design with a small system footprint. The Constellation System can be customized to many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.
† SEMI standard sizes up to 200mm. Other sizes are available upon request.
* Custom wafer cassettes upon request.
◊ CLP Slit Valve and Isolation Plumbing come standard with each cassette load port.
‡ Optional CLP Slit Valve and Isolation Plumbing available.
PRODUCT SPECIFICATIONS
HA-200 | HA-400 | HA-500 | HA-600 | HA-800 | |
Wafer Sizes | ≤200mm† | ||||
Sides | 4 | 4 | 5 | 6 | 8 |
Cassette Load Lock | 1 | 1 | 2 | 2 | 2 |
Transfer Height | 1100mm | ||||
High Vacuum Package | Available | ||||
Wafer per Cassette | 25* | ||||
Vacuum performance | <5.00E-07 Torr | ||||
Input Power | 208 VAC 20A 1Ø | ||||
Electrical Integration | Yes | ||||
Maximum Temperature | 100⁰C | ||||
MCBF | >3.00E+06 | ||||
MTTR | <2 hours | ||||
Materials exposed | 6061-T6 Aluminum, | ||||
Interface | 200mm MESC‡ | 200mm MESC◊ | |||
Control Interface | RS-232 / Ethernet | ||||
SEMI S2 | Compliant | ||||
CE | Compliant | ||||