Vacuum Aligners

High vacuum environment Aligners

Vacuum Aligners

High vacuum environment Aligners

Vacuum-Aligners

FEATURES

  • High reliability of > 3 million MCBF

  • Fiducial alignment and centering alignment – Delta Pick

  • High vacuum compatible

  • RS-232 / Ethernet control interface

  • CE/S2 compliant

  • Available for wafer sizes up to 300mm

  • Class 1 cleanroom compatible

  • Translucent or opaque wafers

Automation-Gears

High vacuum environment aligners

Our aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although our Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks.

Brochure

Vacuum Aligners

PRODUCT SPECIFICATIONS

HA-71

HA-75

HA-75C/HA-76

Wafer Sizes

100-200 mm

Wafer Types

Opaque and Transparent

Mounting Facet

200mm or 300mm Facet

N/A

Aligner Enclosure Size

200mm or 300mm

Integrated Aligner

Axes of Motion

θ

Vacuum Performance

Base operating pressure

Leak Rate

<5.00E-09 Torr

1.00E-09 scc He/sec

Input Power

24V DC at 2.0 Amps

Maximum Temperature

300⁰C

Exposed Materials

6061-T6 Aluminum, Stainless Steel 300 and 400 Series,
Viton, Borosilicate Glass

Control Interface

RS-232 / Ethernet

MCBF

>3.00E+06

CE

Compliant

SEMI

Compliant

Repeatability

0

Centering

Measured as three standard deviations (3σ).

0.03⁰   |   0.01⁰

            <0.10mm   |   < 0.051 mm (3σ)

Calibration Wafer

Included

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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