Vacuum Cassette Load Ports

Vacuum Cassette Load Ports

Vacuum Cassette Load Ports

Vacuum Cassette Load Ports

CLP-Vacuum-Cassette-to-Cassette-Load-Port

CLP – Vacuum Cassette to Cassette Load Port for 25 & 50 wafer cassette

MLP – Vacuum Mini Load Port for Single wafer up to a 4-wafer cassette

MLP / CLP FEATURES

  • Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator

  • High reliability of > 3 million MCBF

  • Handles wafer sizes up to 200mm

  • Safety interlocks

  • High Vacuum Capability

  • RS-232 / Ethernet Control Interface

MLP-200 / MLP-300 OPTIONS

  • Vacuum gas plumbing

  • 1-4 wafer cassettes

  • Slit Valve or Valve door

CLP-200/300 SPECIFIC  FEATURES

  • High Through-put

  • “Plug & Play” Vacuum Transport System

  • Wafer & Cassette Sensors for System Readiness

  • Reduced System Footprint

  • Universal Head Plate

  • Sophisticated automation features including wafer mapping, wafer cross- slot detection

CLP-200/300 OPTIONS

  • Dual Wafer Mapping Sensors

  • Multiple View ports on side and door of CLP

  • Wafer Cassette on Tilt-Out Cassette Cradle Assembly

  • Slit Valve or Valve door

Automation-Gears

Vacuum and Atmospheric Cassette Load Ports

Designed to provide cassette loading and unloading capabilities for the Constellation family of cluster systems our Vacuum Cassette to Cassette Load Ports (CLP) can be customized to adapt to a customer’s specific requirements. The various Load Port configurations are built around the Hine Automation Vacuum Elevators with material indexing and positional sensing capabilities.

The Vacuum Mini Load Port (MLP) is designed as a single and multi-wafer Load Port to provide loading and unloading capabilities for Hine’s Integrated Wafer Handling Systems. The MLP configuration is cost-effective solution for application where a full Cassette is not required. The MLP also includes a self-centering design for the cassette and wafer, eliminating the need for a positional alignment device.

Full system integration requires only limited facilities connections and an Ethernet control interface. With a complete onboard control system, our Load Ports function as an intelligent material handling sub system.

Brochure

Hine_Cassette_Load_Ports_Brochure

PRODUCT SPECIFICATIONS

Specifications

Mini-Load Port (MLP)

Manual Door CLP

Autodoor CLP

Wafer Sizes

≤ 200mm 

300mm (for MLP-300 only)

≤200mm

300mm (for CLP-300 only)

Door Open/Close Time

N/A

16 seconds

Air Pressure (Autodoor)

N/A

Mapping Time

N/A

20 seconds

Payload Capacity

Up to 34kg

Base Operating Pressure

<5.00 E-6 Torr

Leak Rate

<2.0 x 10-8 scc He/sec

Total Weight

~110Kgs (240 lbs.)

Reliability

N/A

3,000,000 MCBF

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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