Atmospheric Vacuum Robotic Arms

Atmospheric robots are high-performance substrate handling solutions for semiconductor applications

Atmospheric Vacuum Robotic Arms

Atmospheric robots are high-performance substrate handling solutions for semiconductor applications

FEATURES

High reliability of > 10 million MCBF
3-axis motion control
Pay load up to 0.5kg
Standard and custom size arm segments
Standard and custom end effectors for SEMI standard wafers and custom substrates
Compact design including integrated controller
RS-232 / Ethernet control interface
The best replacements for the Zbot and Orbitran robots

OPTIONS

End effector types: Vacuum chuck, Edge gripper
Wafer mapping sensor
Single / Dual end effector blades
Custom vertical strokes
Track mounting
Custom payloads

Atmospheric robots high-performance substrate handling solutions

Hine atmospheric robots are high-performance substrate handling solutions for semiconductor applications. These SCARA type robots provide reliable and clean transfer mechanism for atmospheric front ends. Hine atmospheric robots transfer a wide variety of substrates including SEMI standard wafers, reticles and masks.

Brochure

* Hine Automation offers end effectors for SEMI standard sizes up to 200mm.
Other sizes are available upon request.
† Payload with standard configuration
‡ Up from the Home Position
** Counter Clockwise from the Home Position
†† from center (wrist position with 140mm standard arms)
‡‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

	HAtm-4.0	Both	HAtm-5.0
Z‐Travel	0mm Up from the Home Position		184mm Up from the Home Position
Rotational Travel		365° CW from the Home Position
Reach	329mm from Home Position (with 114mm standard arms)		465mm from center (with 140mm standard arms)
Z‐Repeatability	±0.05mm (measured at the wrist)		±0.03mm (measured at the wrist)
Reach Repeatability	±0.1mm (measured at the wrist)		±0.03mm (measured at the wrist)
Rotational Repeatability		±0.01° (measured at the wrist)
Z‐Speed		±450mm/s
Reach Speed		±1000mm/s
Rotational Speed		±360°/s
Maximum Payload		0.5 Kg (standard configuration)
Power	24VDC @ 3.0 Amps		24VDC @ 7.0 Amps
Weight	5 Kg		14 Kg
MCBF		> 1.5 x 107 Cycles
Stations Available	60
Position Teaching		Teach Utility Included
Control Interface	Digital, RS‐232 and Ethernet		Digital, RS-232 & Ethernet