Project Description

Atmospheric Vacuum Robotic Arms

Atmospheric robots are high-performance substrate handling solutions for semiconductor applications

Atmospheric Vacuum Robotic Arms

Atmospheric robots are high-performance substrate handling solutions for semiconductor applications

Atmospheric_Robotic_Arms

FEATURES

  • High reliability of > 10 million MCBF

  • 3-axis motion control

  • Pay load up to 0.5kg

  • Standard and custom size arm segments

  • Standard and custom end effectors for SEMI standard wafers and custom substrates

  • Compact design including integrated controller

  • RS-232 / Ethernet control interface

  • The best replacements for the Zbot and Orbitran robots

OPTIONS

  • End effector types: Vacuum chuck, Edge gripper

  • Wafer mapping sensor

  • Single / Dual end effector blades

  • Custom vertical strokes

  • Track mounting

  • Custom payloads

Automation-Gears

Atmospheric robots high-performance substrate handling solutions

Hine atmospheric robots are high-performance substrate handling solutions for semiconductor applications. These SCARA type robots provide reliable and clean transfer mechanism for atmospheric front ends. Hine atmospheric robots transfer a wide variety of substrates including SEMI standard wafers, reticles and masks.

Brochure

Atmospheric robotic arms brochure

* Hine Automation offers end effectors for SEMI standard sizes up to 200mm.
 Other sizes are available upon request.
† Payload with standard configuration
‡ Up from the Home Position
** Counter Clockwise from the Home Position
†† from center (wrist position with 140mm standard arms)
‡‡ Measured as three standard deviations (3σ)

PRODUCT SPECIFICATIONS

HAtm-4.0

Both

HAtm-5.0

Z‐Travel

0mm Up from the Home Position

184mm Up from the Home Position

Rotational Travel

365° CW from the Home Position

Reach

329mm from Home Position
(with 114mm standard arms)

465mm from center
(with 140mm standard arms)

Z‐Repeatability

±0.05mm (measured at the wrist)

±0.03mm (measured at the wrist)

Reach Repeatability

±0.1mm (measured at the wrist)

±0.03mm (measured at the wrist)

Rotational Repeatability

±0.01° (measured at the wrist)

Z‐Speed

±450mm/s

Reach Speed

±1000mm/s

Rotational Speed

±360°/s

Maximum Payload

0.5 Kg (standard configuration)

Power

24VDC @ 3.0 Amps

24VDC @ 7.0 Amps

Weight

5 Kg

14 Kg

MCBF

> 1.5 x 107 Cycles

Stations Available

60

Position Teaching

Teach Utility Included

Control Interface

Digital, RS‐232 and Ethernet

Digital, RS-232 & Ethernet

Related Products

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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