Integrated Systems

Hine Automation LLC’s Integrated Systems enable tool automation for process equipment manufacturers supporting the Display, Semiconductor, MEMS and Nanoscale Research industries and support many advanced process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Ion Beam Deposition, Reactive Ion Etch and Inductively Coupled Etch.

Our Star Systems are automated load locks developed for production and research and development environments. This Single Substrate Vacuum Transfer Systems can be configured to automate many process applications. 

Our Constellation Systems are Cassette-to-Cassette Vacuum Transfer systems and are the ideal tool automation solution for high volume production environments. This cluster system can be easily customized to meet any OEMs’ needs. 

 

 

 

 

 

 


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