VACUUM TRANSFER SYSTEMS

Cassette-to-Cassette Vacuum Transfer Systems

As Cassette-To-Cassette Vacuum Transfer Systems, the Constellation Systems integrate the reliability of Hine Vacuum Robotics and the latest system integration technology into a functional design with a small system footprint. The Constellation System can be customized to many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.

 

FEATURES

  • Hine Robotics:  HA-5.0 Robotic Arm & HA-50V Vacuum Elevator
  • High reliability of > 3 million MCBF
  • Handles wafer sizes up to 200mm
  • Sophisticated automation features including wafer mapping, wafer cross-slot detection
  • Safety interlocks
  • High vacuum compatibility
  • CE/S2 compliant
  • RS-232 / Ethernet control interface

 

OPTIONS

  • Optical aligner
  • SEMI standard and custom end effectors
  • Dual/Single end effector
  • 25 or 50 wafer cassettes
HA-200 HA-400 HA-500 HA-600 HA-800
Wafer Sizes ≤200mm†
Sides 4 4 5 6 8
Cassette Load Lock 1 1 2 2 2
Transfer Height 1100mm
High Vacuum Package Available
Wafer per Cassette 25*
High payload option Yes
Vacuum performance
Base operating pressure
Leak rate
<5.00E-07 Torr
5.00E-09 scc He/sec
Input Power 208 VAC 20A 1Ø
Electrical Integration Yes
Maximum Temperature 100⁰C
MCBF >3.00E+06
MTTR <2 hours
Materials exposed 6061-T6 Aluminum,
Stainless Steel 300 and
400 Series, Viton,
Borosilicate Glass
Interface 200mm MESC‡ 200mm MESC◊
Control Interface RS-232 / Ethernet
SEMI S2 Compliant
CE Compliant

† SEMI standard sizes up to 200mm. Other sizes are available upon request.

* Custom wafer cassettes upon request.

◊ CLP Slit Valve and Isolation Plumbing come standard with each cassette load port.

‡ Optional CLP Slit Valve and Isolation Plumbing available.

 

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Moving Your Technology

12495 34th St. North, Suite B, St. Petersburg, FL 33716

+1(813)749-7519

sales@hineautomation.com

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