Robotic Components

We offer robotic arms, aligners, elevators, and cassette load ports for vacuum and atmospheric applications. All Hine Automation robotic components are compatible with ultra-clean environments. 

Our Atmospheric and Vacuum Robotic Arms provide substrate handling solutions for OEMs and can be easily integrated with any process modules or any cluster system front end.  


Our Atmospheric and Vacuum Elevators provide precise substrate indexing capabilities.   


Our Vacuum Aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. They may be integrated into any system with a robotic arm able to execute Delta Picks.

Our Vacuum and Atmospheric Cassette to Cassette and Vacuum Mini Load Ports provide substrate handling solutions for OEMs and can be easily integrated with any transfer module or cluster system operating in a high vacuum environment.

 

 

 


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