Atmospheric Robotic Arms

Hine atmospheric robots are high-performance substrate handling solutions for semiconductor applications. These SCARA type robots provide reliable and clean transfer mechanism for atmospheric front ends. Hine atmospheric robots transfer a wide variety of substrates including SEMI standard wafers, reticles and masks.


  • High reliability of > 10 million MCBF
  • 3-axis motion control
  • Pay load up to 0.5kg
  • Standard and custom size arm segments
  • Standard and custom end effectors for SEMI standard wafers
    and custom substrates
  • Compact design including integrated controller
  • RS-232 / Ethernet control interface
  • The best replacements for the Zbot
    and Orbitran robots


  • End effector types: Vacuum chuck, Edge gripper
  • Wafer mapping sensor
  • Single / Dual end effector blades
  • Custom vertical strokes
  • Track mounting
  • Custom payloads

(click to enlarge chart below)



Atmospheric Robotic Arms Brochure

Atmospheric Robot HAtm-4.0 VIDEO

Satellite HAtm-4.0 Atmospheric Robotic Arm (Orbitran replacement) Video on YouTube

HAtm-5.0 VIDEO

Atmospheric Robotic Arm Video, Gasonic System Demo on YouTube

Atmospheric Robotic Arm Video, Test Stand Demo on YouTube


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