Vacuum Aligners

Our aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although our Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks. 

FEATURES

• High reliability of > 3 million MCBF
• Fiducial alignment and centering alignment - Delta Pick
• High vacuum compatible
• RS-232 / Ethernet control interface
• CE/S2 compliant
• Available for wafer sizes up to 300mm
• Class 1 cleanroom compatible
• Translucent or opaque wafers

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PRODUCT BROCHURE

Vacuum Aligners

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